Photoluminescence emission from as-etched quantum nanodisks fabricated by bio-template and neutral beam etching process

D. Ohori, K. Kondo, K. Sakai, A. Higo, Cedric Emmanuel Thomas, S. Samukawa, T. Ikari, A. Fukuyama

研究成果: Conference contribution

抄録

Quantum dot laser diodes are expected to replace conventional semiconductor laser diodes in new high-speed information and communication devices. We successfully fabricated disk-shaped quantum dots using a bio-template and neutral beam etching. Our original top-down process achieved defect-less and a high density of dots from etching process compared with conventional plasma processes. Therefore, we attempted to detect emission from the quantum energy levels in the quantum nanodisks (QNDs) for as-etched sample without post-fabrication process. We prepared 4-stacked GaAs/AlGaAs layer QNDs samples after etching (as-etched) and after regrowth. QNDs samples were investigated by photoluminescence (PL) measurements. Results showed some broad peaks appearing between the bandgaps of GaAs and AlGaAs. We compared our experimental results with energies theoretically estimated energies using a nextnano 3D simulator with QND different diameters. For both type of samples, we found that QND diameters increased from top to bottom. From PL measurement, we observed emission from QNDs for as-etched samples fabricated using our own original top-down process.

本文言語English
ホスト出版物のタイトル16th International Conference on Nanotechnology - IEEE NANO 2016
出版社Institute of Electrical and Electronics Engineers Inc.
ページ321-322
ページ数2
ISBN(電子版)9781509039142
DOI
出版ステータスPublished - 2016 11 21
イベント16th IEEE International Conference on Nanotechnology - IEEE NANO 2016 - Sendai, Japan
継続期間: 2016 8 222016 8 25

出版物シリーズ

名前16th International Conference on Nanotechnology - IEEE NANO 2016

Other

Other16th IEEE International Conference on Nanotechnology - IEEE NANO 2016
CountryJapan
CitySendai
Period16/8/2216/8/25

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Atomic and Molecular Physics, and Optics

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