抄録
We have developed an integrated micro-probe with improved detection efficiency for apertureless NSOM by using micromachining techniques; we call this probe a 'photocantilever'. A photocantilever is an integrated microcantilever with a pn-junction at its end; it is fabricated using micromachining techniques. It has achieve higher collection efficiency than conventional near-field scanning optical microscopy(NSOM) probes because the detector is placed close to the scatterer. Two new types of NSOM can be performed using this photocantilever: totally-internal-reflection-illumination-based NSOM and differential NSOM. Both provide NSOMs with high spatial resolution. The photocantilever enables apertureless NSOM with high collection efficiency and high resolution.
本文言語 | English |
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ページ(範囲) | 21-31 |
ページ数 | 11 |
ジャーナル | Proceedings of SPIE - The International Society for Optical Engineering |
巻 | 3791 |
出版ステータス | Published - 1999 12月 1 |
外部発表 | はい |
イベント | Proceedings of the 1999 Near-Field Optics: Physics, Devices, and Information Processing - Denver, CO, USA 継続期間: 1999 7月 22 → 1999 7月 23 |
ASJC Scopus subject areas
- 電子材料、光学材料、および磁性材料
- 凝縮系物理学
- コンピュータ サイエンスの応用
- 応用数学
- 電子工学および電気工学