Photocantilever: an integrated micro-probe for near-field optical microscopy

Kenji Fukuzawa, Yuriko Tanaka, Hiroki Kuwano, Hiroshi Yoshikawa, Toshifumi Ohkubo, Tadashi Kato

研究成果: Conference article査読

抄録

We have developed an integrated micro-probe with improved detection efficiency for apertureless NSOM by using micromachining techniques; we call this probe a 'photocantilever'. A photocantilever is an integrated microcantilever with a pn-junction at its end; it is fabricated using micromachining techniques. It has achieve higher collection efficiency than conventional near-field scanning optical microscopy(NSOM) probes because the detector is placed close to the scatterer. Two new types of NSOM can be performed using this photocantilever: totally-internal-reflection-illumination-based NSOM and differential NSOM. Both provide NSOMs with high spatial resolution. The photocantilever enables apertureless NSOM with high collection efficiency and high resolution.

本文言語English
ページ(範囲)21-31
ページ数11
ジャーナルProceedings of SPIE - The International Society for Optical Engineering
3791
出版ステータスPublished - 1999 12月 1
外部発表はい
イベントProceedings of the 1999 Near-Field Optics: Physics, Devices, and Information Processing - Denver, CO, USA
継続期間: 1999 7月 221999 7月 23

ASJC Scopus subject areas

  • 電子材料、光学材料、および磁性材料
  • 凝縮系物理学
  • コンピュータ サイエンスの応用
  • 応用数学
  • 電子工学および電気工学

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