Phase velocity control of surface acoustic waves based on surface shorting and electrical field application using MEMS switches

Jan H. Kuypers; Marek E. Schmidt; Shuji Tanaka; Masayoshi Esashi

doi:10.1109/ULTSYM.2007.310

Phase velocity control of surface acoustic waves based on surface shorting and electrical field application using MEMS switches

Jan H. Kuypers, Marek E. Schmidt, Shuji Tanaka, Masayoshi Esashi

工学研究科・ロボティクス専攻

研究成果: Conference contribution

12 被引用数 (Scopus)

抄録

We have investigated controlling the phase velocity of a surface acoustic wave (SAW) by a microelectromechanical switch fabricated on a high coupling piezoelectric substrate. The principle is based on the interaction of the evanescent surface potential of the SAW with the conductive switch. In theory tuning of the velocity in the range given by ν₀ and ν_m, i.e. the velocity for a SAW on a free and metallized substrate, is possible. We have achieved up to 17.6 m/s (0.44 %) velocity tuning on 128°YX LiNbO₃. A maximum velocity sensitivity of Δν/ν of 15×10^-3/V and phase sensitivity of 700°/V was measured. This is five orders of magnitude larger than values obtained for electrical field tuning.

本文言語	English
ホスト出版物のタイトル	2007 IEEE Ultrasonics Symposium Proceedings, IUS
ページ	1233-1238
ページ数	6
DOI	https://doi.org/10.1109/ULTSYM.2007.310
出版ステータス	Published - 2007 12月 1
イベント	2007 IEEE Ultrasonics Symposium, IUS - New York, NY, United States 継続期間: 2007 10月 28 → 2007 10月 31

出版物シリーズ

名前	Proceedings - IEEE Ultrasonics Symposium
ISSN（印刷版）	1051-0117

Other

Other	2007 IEEE Ultrasonics Symposium, IUS
国/地域	United States
City	New York, NY
Period	07/10/28 → 07/10/31

ASJC Scopus subject areas

音響学および超音波学

文献へのアクセス

10.1109/ULTSYM.2007.310

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引用スタイル

Kuypers, JH, Schmidt, ME, Tanaka, S & Esashi, M 2007, Phase velocity control of surface acoustic waves based on surface shorting and electrical field application using MEMS switches. in 2007 IEEE Ultrasonics Symposium Proceedings, IUS., 4409883, Proceedings - IEEE Ultrasonics Symposium, pp. 1233-1238, 2007 IEEE Ultrasonics Symposium, IUS, New York, NY, United States, 07/10/28. https://doi.org/10.1109/ULTSYM.2007.310

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title = "Phase velocity control of surface acoustic waves based on surface shorting and electrical field application using MEMS switches",

abstract = "We have investigated controlling the phase velocity of a surface acoustic wave (SAW) by a microelectromechanical switch fabricated on a high coupling piezoelectric substrate. The principle is based on the interaction of the evanescent surface potential of the SAW with the conductive switch. In theory tuning of the velocity in the range given by ν0 and νm, i.e. the velocity for a SAW on a free and metallized substrate, is possible. We have achieved up to 17.6 m/s (0.44 %) velocity tuning on 128°YX LiNbO3. A maximum velocity sensitivity of Δν/ν of 15×10-3/V and phase sensitivity of 700°/V was measured. This is five orders of magnitude larger than values obtained for electrical field tuning.",

keywords = "Electrical field tuning, Surface acoustic waves, Surface shorting effect, Tunable SAW device, Velocity tuning",

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N2 - We have investigated controlling the phase velocity of a surface acoustic wave (SAW) by a microelectromechanical switch fabricated on a high coupling piezoelectric substrate. The principle is based on the interaction of the evanescent surface potential of the SAW with the conductive switch. In theory tuning of the velocity in the range given by ν0 and νm, i.e. the velocity for a SAW on a free and metallized substrate, is possible. We have achieved up to 17.6 m/s (0.44 %) velocity tuning on 128°YX LiNbO3. A maximum velocity sensitivity of Δν/ν of 15×10-3/V and phase sensitivity of 700°/V was measured. This is five orders of magnitude larger than values obtained for electrical field tuning.

AB - We have investigated controlling the phase velocity of a surface acoustic wave (SAW) by a microelectromechanical switch fabricated on a high coupling piezoelectric substrate. The principle is based on the interaction of the evanescent surface potential of the SAW with the conductive switch. In theory tuning of the velocity in the range given by ν0 and νm, i.e. the velocity for a SAW on a free and metallized substrate, is possible. We have achieved up to 17.6 m/s (0.44 %) velocity tuning on 128°YX LiNbO3. A maximum velocity sensitivity of Δν/ν of 15×10-3/V and phase sensitivity of 700°/V was measured. This is five orders of magnitude larger than values obtained for electrical field tuning.

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