Phase shifting method for non-sinusoidal interference fringes with phase shift error

Songzhe Lian, Haiquan Yang, Hiroyuki Kudo, Hidekazu Takano, Atsushi Momose

研究成果: Article査読

1 被引用数 (Scopus)

抄録

When applying phase shifting interferometry to practical phase measurement, the wave may become non-sinusoidal, and could include some phase shift errors. Prior phase shift algorithms are primarily used for sinusoidal cases, and can cause system errors when used for these non-sinusoidal interference. We propose two phase recovery methods for non-sinusoidal interference fringes: Specifically, a least-squares-based fitting algorithm that eliminates system errors using a sufficient number of measured images, and a Fourier transform-based method that effectively suppresses system errors using a lower (or insufficient) number of images. Simulation and experimental results verify the efficacy of the proposed methods.

本文言語English
論文番号112005
ジャーナルJapanese journal of applied physics
58
11
DOI
出版ステータスPublished - 2019

ASJC Scopus subject areas

  • 工学(全般)
  • 物理学および天文学(全般)

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