Passivated piezoresistive rotation angle sensor integrated in micromirror

Minora Sasaki, Motoki Tabata, Kazuhiro Hane

研究成果: Conference contribution

抄録

A piezoresistive rotation angle sensor integrated in a micromirror device is improved with the passivation film. The sensor detects the shear stress inside the torsion bar generated by the mirror rotation under the electrostatic driving. The rotation angle is measured during the actuation. The passivation film reduces the leak current. The sensor signal shows the better performance showing the smaller hysteresis.

本文言語English
ホスト出版物のタイトル2007 IEEE/LEOS International Conference on Optical MEMS and Nanophotonics, OMENS
ページ193-194
ページ数2
DOI
出版ステータスPublished - 2007 12 1
イベント2007 IEEE/LEOS International Conference on Optical MEMS and Nanophotonics, OMENS - Hualien, Taiwan, Province of China
継続期間: 2007 8 122007 8 16

出版物シリーズ

名前2007 IEEE/LEOS International Conference on Optical MEMS and Nanophotonics, OMENS

Other

Other2007 IEEE/LEOS International Conference on Optical MEMS and Nanophotonics, OMENS
CountryTaiwan, Province of China
CityHualien
Period07/8/1207/8/16

ASJC Scopus subject areas

  • Control and Systems Engineering
  • Electrical and Electronic Engineering

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