Parallelism measurement of the slide axis with respect to the spindle axis of a diamond turning machine

Jungchul Lee, Youngjin Noh, Yoshikazu Arai, Wei Gao, Jooho Hwang, Chunhong Park

研究成果: Paper査読

抄録

To measure the parallelism error between the Z-slide axis and the spindle axis of the ultra precision diamond turning machine which has a T-base design with a spindle, an X-slide and a Z-slide, the rotating reversal method is carried out. Two capacitance probes are employed for the measurement of the cylinder workpiece(for rotating) which was installed on the spindle. The straightness error of the Z-slide of the ultra-precision diamond turning machine was measured to be about 100 nm and parallelism error was evaluated to be approximately 0.84 arc-second of the Z-slide by the rotating reversal method over a movement range of 126 mm.

本文言語English
出版ステータスPublished - 2009 12 1
イベント5th International Conference on Leading Edge Manufacturing in 21st Century, LEM 2009 - Osaka, Japan
継続期間: 2009 12 22009 12 4

Other

Other5th International Conference on Leading Edge Manufacturing in 21st Century, LEM 2009
国/地域Japan
CityOsaka
Period09/12/209/12/4

ASJC Scopus subject areas

  • 産業および生産工学

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