To measure the parallelism error between the Z-slide axis and the spindle axis of the ultra precision diamond turning machine which has a T-base design with a spindle, an X-slide and a Z-slide, the rotating reversal method is carried out. Two capacitance probes are employed for the measurement of the cylinder workpiece(for rotating) which was installed on the spindle. The straightness error of the Z-slide of the ultra-precision diamond turning machine was measured to be about 100 nm and parallelism error was evaluated to be approximately 0.84 arc-second of the Z-slide by the rotating reversal method over a movement range of 126 mm.
|出版ステータス||Published - 2009 12 1|
|イベント||5th International Conference on Leading Edge Manufacturing in 21st Century, LEM 2009 - Osaka, Japan|
継続期間: 2009 12 2 → 2009 12 4
|Other||5th International Conference on Leading Edge Manufacturing in 21st Century, LEM 2009|
|Period||09/12/2 → 09/12/4|
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