Microwave heating was applied to metal titanium powders at high oxygen partial pressure (10-5 atm) and the partial pressure of exhaust-gas were measured using an oxygen sensor made of solid electrolyte. During the application of the heating, the pressure decreased to an order of 10 -10 atm and quickly increased to an order of 10-5 atm and then oxygen emission peaks were observed. Furthermore, the nitriding mechanism was discussed for Ti14O13 model in terms of quantum chemistry. The quantum-chemical simulation showed that Ti-O bonding of titanium oxide is anti-bonding and consists of 3d orbital. The orbital becomes steady state by removing an oxygen atom from the model.
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