Oscillator based surface acoustic wave gyroscopes

Yusuke Musha, Motoaki Hara, Hiroki Asano, Hiroki Kuwano

研究成果: Conference contribution

2 被引用数 (Scopus)

抄録

In this paper, angular rate sensing based on surface acoustic wave (SAW) resonance was newly reported. Our sensor uses an oscillator consisted of a single SAW resonator and an amplifier. The angular rate was obtained from the change of oscillation frequency. The SAW resonator was a one-port resonator, and simply constructed by an interdigital transducer (IDT) and a pair of grating reflector. Any nanoscale scattering patterns or any complicate unidirectional IDTs (UDTs) were not included. In the demonstration, the sensitivity of 7.×-3 Hz /deg·s-1 was achieved when using the SAW resonator with the resonant frequency of 9.7 MHz. The SAW gyroscopes can detect the angular rate as the rotation axis was parallel to the SAW propagation direction. But, it did not reply when the rotation axis was orthogonal. These results agreed with theoretical predictions well.

本文言語English
ホスト出版物のタイトル2016 IEEE 11th Annual International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2016
出版社Institute of Electrical and Electronics Engineers Inc.
ページ557-560
ページ数4
ISBN(電子版)9781509019472
DOI
出版ステータスPublished - 2016 11月 28
イベント11th IEEE Annual International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2016 - Sendai, Japan
継続期間: 2016 4月 172016 4月 20

出版物シリーズ

名前2016 IEEE 11th Annual International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2016

Other

Other11th IEEE Annual International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2016
国/地域Japan
CitySendai
Period16/4/1716/4/20

ASJC Scopus subject areas

  • 産業および生産工学
  • 機械工学
  • 材料力学
  • 電子材料、光学材料、および磁性材料

フィンガープリント

「Oscillator based surface acoustic wave gyroscopes」の研究トピックを掘り下げます。これらがまとまってユニークなフィンガープリントを構成します。

引用スタイル