TY - GEN
T1 - Oscillator based surface acoustic wave gyroscopes
AU - Musha, Yusuke
AU - Hara, Motoaki
AU - Asano, Hiroki
AU - Kuwano, Hiroki
N1 - Publisher Copyright:
© 2016 IEEE.
PY - 2016/11/28
Y1 - 2016/11/28
N2 - In this paper, angular rate sensing based on surface acoustic wave (SAW) resonance was newly reported. Our sensor uses an oscillator consisted of a single SAW resonator and an amplifier. The angular rate was obtained from the change of oscillation frequency. The SAW resonator was a one-port resonator, and simply constructed by an interdigital transducer (IDT) and a pair of grating reflector. Any nanoscale scattering patterns or any complicate unidirectional IDTs (UDTs) were not included. In the demonstration, the sensitivity of 7.×-3 Hz /deg·s-1 was achieved when using the SAW resonator with the resonant frequency of 9.7 MHz. The SAW gyroscopes can detect the angular rate as the rotation axis was parallel to the SAW propagation direction. But, it did not reply when the rotation axis was orthogonal. These results agreed with theoretical predictions well.
AB - In this paper, angular rate sensing based on surface acoustic wave (SAW) resonance was newly reported. Our sensor uses an oscillator consisted of a single SAW resonator and an amplifier. The angular rate was obtained from the change of oscillation frequency. The SAW resonator was a one-port resonator, and simply constructed by an interdigital transducer (IDT) and a pair of grating reflector. Any nanoscale scattering patterns or any complicate unidirectional IDTs (UDTs) were not included. In the demonstration, the sensitivity of 7.×-3 Hz /deg·s-1 was achieved when using the SAW resonator with the resonant frequency of 9.7 MHz. The SAW gyroscopes can detect the angular rate as the rotation axis was parallel to the SAW propagation direction. But, it did not reply when the rotation axis was orthogonal. These results agreed with theoretical predictions well.
KW - Sensor module
KW - Surface acoustic wave (SAW)
KW - gyroscope
KW - oscillator
UR - http://www.scopus.com/inward/record.url?scp=85007178935&partnerID=8YFLogxK
UR - http://www.scopus.com/inward/citedby.url?scp=85007178935&partnerID=8YFLogxK
U2 - 10.1109/NEMS.2016.7758313
DO - 10.1109/NEMS.2016.7758313
M3 - Conference contribution
AN - SCOPUS:85007178935
T3 - 2016 IEEE 11th Annual International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2016
SP - 557
EP - 560
BT - 2016 IEEE 11th Annual International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2016
PB - Institute of Electrical and Electronics Engineers Inc.
T2 - 11th IEEE Annual International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2016
Y2 - 17 April 2016 through 20 April 2016
ER -