Optimization of the growth conditions for molecular beam epitaxy of Mg xZn1-xO (0 < x < 0:12) films on Zn-polar ZnO substrates

Hiroyuki Yuji, Ken Nakahara, Kentaro Tamura, Shunsuke Akasaka, Yoshio Nishimoto, Daiju Takamizu, Takeyoshi Onuma, Shigefusa F. Chichibu, Atsushi Tsukazaki, Akira Ohtomo, Masashi Kawasaki

研究成果: Article査読

10 被引用数 (Scopus)


We report on optimization of the growth conditions for Mg xZn1-xO (x = 0; 0:04; 0:05; 0:12) thin films grown on c-plane Zn-polar ZnO single crystal substrates by using plasma-assisted molecular beam epitaxy (PAMBE). A normal vector to the ZnO substrate surfaces was angled at 0:5 ± 0:1° off from the [0001] c-axis toward the [11̄100] direction, leading to a stable step-and-terrace structure. A growth temperature (Tg) higher than 800 °C led to the ZnO films presenting the first excited state luminescence of A-free excitons in photoluminescence (PL) spectra at 12 K. A Tg higher than 800 °C enhanced optical attributes of a MgxZn1-xO film. The longest PL lifetime of fast-decay components reached 3.5 ns in time-resolved PL measurement for an Mg0.12Zn0.88O film grown at 900 °C, indicating a concentration of nonradiative recombination centers is substantially eliminated compared to the previously reported PL lifetime of 60 ps for an Mg0.11Zn0.89O film grown by pulsed laser deposition.

ジャーナルJapanese journal of applied physics
7 PART 1
出版ステータスPublished - 2010 7

ASJC Scopus subject areas

  • Engineering(all)
  • Physics and Astronomy(all)

フィンガープリント 「Optimization of the growth conditions for molecular beam epitaxy of Mg <sub>x</sub>Zn<sub>1-x</sub>O (0 < x < 0:12) films on Zn-polar ZnO substrates」の研究トピックを掘り下げます。これらがまとまってユニークなフィンガープリントを構成します。