Optically flat micromirror designs using stretched membrane with crystallization-induced stress

Minora Sasaki, Takashi Sasaki, Kazuhiro Hane, Hideo Miura

研究成果: Conference contribution

抄録

The flat and light-weighted micromirror is realized using the tense poly-Si membrane across a rigid c-Si drum. The tensile stress of ∼600 MPa is obtained using the crystallization of a-Si. The yield ratio depends on the design. The membrane profile is found to depend on the process sequence relating to the timing of the crystalization. The mirror satisfies the optical flatness <λ/10 for the visible light. The peak-to-valley distance of ∼20 nm is realized in the best design. The mirror flatness is stable against the temperature even though the mirror is metalized.

本文言語English
ホスト出版物のタイトルLEOS 2007 - IEEE Lasers and Electro-Optics Society Annual Meeting Conference Proceedings
ページ709-710
ページ数2
DOI
出版ステータスPublished - 2007 12 1
イベント20th Annual Meeting of the IEEE Lasers and Electro-Optics Society, LEOS - Lake Buena Vista, FL, United States
継続期間: 2007 10 212007 10 25

出版物シリーズ

名前Conference Proceedings - Lasers and Electro-Optics Society Annual Meeting-LEOS
ISSN(印刷版)1092-8081

Other

Other20th Annual Meeting of the IEEE Lasers and Electro-Optics Society, LEOS
国/地域United States
CityLake Buena Vista, FL
Period07/10/2107/10/25

ASJC Scopus subject areas

  • 電子材料、光学材料、および磁性材料
  • 電子工学および電気工学

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