Optical scanner on a three-dimensional microoptical bench

Minoru Sasaki, T. Yamaguchi, J. H. Song, K. Hane, M. Hara, K. Hori

研究成果: Article査読

17 被引用数 (Scopus)

抄録

A three-dimensional (3-D) microoptical bench prepared using bulk micromachining is constructed demonstrating a compact optical setup. Prealigned microstructures with space for mounting bulk elements are prepared. A 3-D photolithographic technique is applied with good repeatability using an originally developed resist spray-coating system. Films grown by low-pressure chemical-vapor deposition (LPCVD) are used as construction layers combining with 3-D bulk structures. A skew micromirror at the free end of a thermally actuated cantilever is fabricated facing to a laser diode chip. An optical-scan angle of more than 30° and a cutoff frequency of 100 Hz are obtained.

本文言語English
ページ(範囲)602-608
ページ数7
ジャーナルJournal of Lightwave Technology
21
3
DOI
出版ステータスPublished - 2003 3

ASJC Scopus subject areas

  • Atomic and Molecular Physics, and Optics

フィンガープリント 「Optical scanner on a three-dimensional microoptical bench」の研究トピックを掘り下げます。これらがまとまってユニークなフィンガープリントを構成します。

引用スタイル