Optical properties of c-axis oriented Ba2NaNb5O15 thin films formed by electron cyclotron resonance plasma sputtering

Akira Watazu, Hiroshi Masumoto, Yoichiro Masuda, Toshio Hirai

研究成果: Article査読

1 被引用数 (Scopus)

抄録

Thin films of Ba2NaNb5O15 (BNN) with (001) orientation were formed on sapphire (0001) substrates by electron cyclotron resonance plasma sputtering using ring shaped targets. The thin films were obtained at a substrate temperature of 773 K using a target of Ba : Na : Nb= 1.2 : 1.2 : 5.0 composition. The surface of BNN thin films was flat. The thickness of BNN thin films was estimated to be 7.2 μm. The absorption edge of BNN films was about 310 nm. The transmittance in the wavelength between 400 and 2500 nm was more than 75%. The refractive index of the film was estimated to be 2.25-2.34 at 1100 to 2500 nm.

本文言語English
ページ(範囲)687-689
ページ数3
ジャーナルJournal of the Ceramic Society of Japan
105
8
DOI
出版ステータスPublished - 1997 8月

ASJC Scopus subject areas

  • セラミックおよび複合材料
  • 化学 (全般)
  • 凝縮系物理学
  • 材料化学

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