Optical probe detection of high-frequency surface acoustic waves generated by phase velocity scanning of laser interference fringes

Hideo Nishino, Yusuke Tsukahara, Yoshihiko Nagata, Toshio Koda, Kazushi Yamanaka

研究成果: Article査読

9 被引用数 (Scopus)

抄録

Laser-generated high-frequency surface acoustic waves (SAWs) and their optical detection for noncontact and nondestructive materials evaluation were presented. Scanning interference fringes (SIF) produced by intersecting two coherent pulsed laser beams on a tested object with different frequencies were used as a thermoelastic source to generate a 110 MHz SAW. The SAW was detected by the optical knife edge method using another continuous wave (CW) laser as a probe beam. Estimation of the SAW amplitude was carried out and the amplitude enhancement effect of the phase velocity scanning (PVS) method was verified. As a result, the SAW amplitude of 1.4 nm was obtained on an aluminum specimen with 0.71 MW/cm2power density of second-harmonic waves (532 nm) of a Q-switched Nd:YAG laser. An application to anisotropic SAW velocity measurement on a silicon (100) surface was carried out.

本文言語English
ページ(範囲)3260-3264
ページ数5
ジャーナルJapanese journal of applied physics
33
5S
DOI
出版ステータスPublished - 1994 5

ASJC Scopus subject areas

  • Engineering(all)
  • Physics and Astronomy(all)

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