Optical interference type micro hydrophone fabricated by micro-machining

Hiroshi Asanuma, Satoshi Hashimoto, Gaku Suzuki, Hiroaki Niitsuma, Masayoshi Esashi

研究成果: Article査読

4 被引用数 (Scopus)

抄録

A prototype of a miniaturized hydrophone was fabricated using MEMS technologies. The hydrophone was designed to have a performance comparable to conventional commercially available hydrophones. The micro hydrophone was fabricated from a silicon plate and reinforced glass, and it detects pressure waves by using laser interference. The prototype of the hydrophone has a diameter of 9 mm and height of 13mm. The frequency response of the prototype had response from 300 Hz to 1000 Hz, although the absolute sensitivity has not yet been evaluated.

本文言語English
ページ(範囲)45-47
ページ数3
ジャーナルSEG Technical Program Expanded Abstracts
20
1
DOI
出版ステータスPublished - 2001 1 1

ASJC Scopus subject areas

  • Geotechnical Engineering and Engineering Geology
  • Geophysics

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