Present status of our developments of x-ray holographic microscopes at SPring-8 BL20XU is described. A combination of the x-ray undulator and a zone plate enabled us to make a coherent x-ray source of around 0.1 μm size. Using this secondary source, two types of x-ray holographic microscopes were investigated. First, a Gabor microscope in point-projection geometry was tested. A tantalum 0.2 μm line-and-space pattern could be resolved. Second, using a zone plate as a beam splitter, a Fourier transform holographic microscope was tested. A tantalum 0.2 μm line-and-space pattern could be observed. Polystyrene beads of 2.8 μm and 0.8 μm in diameter could be observed. In Fourier transform holography, a reconstructed image of a specimen that is located out of the plane of the reference source is blurred. Numerical focusing of such an x-ray hologram could be successfully demonstrated.
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