Optical encoder using metallic surface grating

Kazuhiro Hane, Kenichi Okuyama, Minoru Sasaki

研究成果: Article査読

1 被引用数 (Scopus)

抄録

With an intense thermal variation, optical encoder yields measuring error because of the generation of nonlinear strain due to the difference of the thermal expansion coefficient between a glass scale and a metallic parts of machines. In this study, a method of using a grating which is directly manufactured on a metallic surface of parts of machines is proposed. Using this method, the thermal strain is made linear and the error becomes simplified to calibrate. Furthermore, it realizes a miniaturization of the system and improves its vibration-resistance. This paper shows the process of making a grating on a metallic surface by photolithography using some methods and ascertains the sufficient performance of this scale in an optical encoder.

本文言語English
ページ(範囲)1532-1536
ページ数5
ジャーナルSeimitsu Kogaku Kaishi/Journal of the Japan Society for Precision Engineering
64
10
DOI
出版ステータスPublished - 1998
外部発表はい

ASJC Scopus subject areas

  • Mechanical Engineering

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