Optical components and actuators for integrated near-field optical data storage

K. Hane, Y. Kanamori, M. Sasaki, J. H. Song

研究成果: Conference article査読

抄録

Data-storage using near-field optical microscopy is a promising technology for the breakthrough of high-density optical disk memory since wavelength limit of conventional lens-optics is not applied. We have proposed a MEMS for the near-field optical data storage, which consists of integrated optical micro-probes and a micro media-translation-table. Three-dimensional lithography based on the bulk micromachining using resist spray coater is applied to the integration of waveguide, micro-pinhole tip, cantilever, and photodiode for the MEMS probes. The media-translation-table consists of the inverted scratch drive actuators (inverted SDAs) fabricated by surface micromachining.

本文言語English
ページ(範囲)197-204
ページ数8
ジャーナルProceedings of SPIE - The International Society for Optical Engineering
5116 I
DOI
出版ステータスPublished - 2003 9 19
イベントSmart Sensors, Actuators, and MEMS - Maspalonas, Gran Canaria, Spain
継続期間: 2003 5 192003 5 21

ASJC Scopus subject areas

  • 電子材料、光学材料、および磁性材料
  • 凝縮系物理学
  • コンピュータ サイエンスの応用
  • 応用数学
  • 電子工学および電気工学

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