Operating limits for stable growth of silicon fibers with diameter less than 150 μm by modified μ-PD method

Boris M. Epelbaum, Kiyoshi Shimamura, Satoshi Uda, Junichi Kon, Tsuguo Fukuda

研究成果: Article査読

11 被引用数 (Scopus)

抄録

The μ-PD method originally developed for oxide crystals has been modified and applied for filamentary silicon crystal growth. Our main modification of μ-PD method is concerned with an arrangement of melt permeable feeder which is inserted into the nozzle. The feeder finishes by a sharp tip the diameter of which (is almost the same as that of the desired semiconductor fiber, i.e., less than 150 μm. Silicon fibers were grown from the small liquid pool at the end of the feeder. Three types of crucible-die arrangement were designed and tested. The best results were obtained with the help of inclined insert made of graphite fibers because of its ability to quench oscillations and longer operation life. Fiber crystals, 100 μm in diameter and 70 mm in length, have been grown successfully. Small meniscus stability, operating limits of μ-PD method and silicon carbide formation during the growth process are discussed.

本文言語English
ページ(範囲)1077-1084
ページ数8
ジャーナルCrystal Research and Technology
31
8
DOI
出版ステータスPublished - 1996 1 1

ASJC Scopus subject areas

  • Chemistry(all)
  • Materials Science(all)
  • Condensed Matter Physics

フィンガープリント 「Operating limits for stable growth of silicon fibers with diameter less than 150 μm by modified μ-PD method」の研究トピックを掘り下げます。これらがまとまってユニークなフィンガープリントを構成します。

引用スタイル