On the origin and elimination of macroscopic defects in MBE films

C. E.C. Wood, L. Rathbun, H. Ohno, D. DeSimone

研究成果: Article査読

75 被引用数 (Scopus)

抄録

Spitting of group III metal droplets from Knudsen type effusion cells has been found culpable for a genre of problematical macroscopic surface topographical defects observed in the growth of semiconductor films by molecular beam epitaxy. Successful precautions are described which virtually eliminate the problem.

本文言語English
ページ(範囲)299-303
ページ数5
ジャーナルJournal of Crystal Growth
51
2
DOI
出版ステータスPublished - 1981 2
外部発表はい

ASJC Scopus subject areas

  • Condensed Matter Physics
  • Inorganic Chemistry
  • Materials Chemistry

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