TY - JOUR
T1 - On-Machine Measurement of Large Mirror Profile by Mixed Method
AU - Kiyono, Satoshi
AU - Gao, Wei
PY - 1992/1/1
Y1 - 1992/1/1
N2 - This paper presents a new differential method called the mixed method, which was developed to measure the profile accurately under the circumstances of on-machine measurement. In comparison with the 2-point method, this method can more remarkably reduce the datum errors due to scanning, vibration and thermal drift. This method also has the advantage of obtaining the high-frequency component of profiles accurately. An optical sensor was designed and made to realize both the 2- point method and the mixed method. With a modulation technique, the sensor has a good thermal drift characteristic. It can measure the displacement and angle of two points on a mirror surface simultaneously with a resolution higher than 0.1 jim and 1 second. Using this sensor, an on-machine measurement system has been constructed, and the measurements of the straightness of cylindrical mirrors have been attempted with the 2-point method and the mixed method. Comparing the results, the favorable characteristics of the mixed method have been confirmed.
AB - This paper presents a new differential method called the mixed method, which was developed to measure the profile accurately under the circumstances of on-machine measurement. In comparison with the 2-point method, this method can more remarkably reduce the datum errors due to scanning, vibration and thermal drift. This method also has the advantage of obtaining the high-frequency component of profiles accurately. An optical sensor was designed and made to realize both the 2- point method and the mixed method. With a modulation technique, the sensor has a good thermal drift characteristic. It can measure the displacement and angle of two points on a mirror surface simultaneously with a resolution higher than 0.1 jim and 1 second. Using this sensor, an on-machine measurement system has been constructed, and the measurements of the straightness of cylindrical mirrors have been attempted with the 2-point method and the mixed method. Comparing the results, the favorable characteristics of the mixed method have been confirmed.
KW - Accuracy
KW - Differential Method
KW - Machine Tool
KW - Measurement
KW - Mirror Surface
KW - On-Machine Measurement
KW - Optical Probe
KW - Profile Measurement
KW - Sensor
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U2 - 10.1299/kikaic.58.1987
DO - 10.1299/kikaic.58.1987
M3 - Article
AN - SCOPUS:84996036452
VL - 58
SP - 1987
EP - 1992
JO - Nihon Kikai Gakkai Ronbunshu, C Hen/Transactions of the Japan Society of Mechanical Engineers, Part C
JF - Nihon Kikai Gakkai Ronbunshu, C Hen/Transactions of the Japan Society of Mechanical Engineers, Part C
SN - 0387-5024
IS - 550
ER -