Observation of micromechanically controlled tuning of photonic crystal line-defect waveguide

Satoshi Iwamoto, Satomi Ishida, Yasuhiko Arakawa, Masatoshi Tokushima, Akiko Gomyo, Hirohito Yamada, Akio Higo, Hiroshi Toshiyoshi, Hiroyuki Fujita

    研究成果: Article

    22 引用 (Scopus)

    抜粋

    We fabricated a photonic crystal (PC) line-defect waveguide integrated with a microelectromechanical actuator and demonstrated the optical switching operation. The device consisted of a PC line-defect waveguide fabricated in a silicon-on-insulator substrate and a polycrystalline-Si dielectric plate located above the PC waveguide. An applied voltage moved the dielectric plate towards the PC surface due to the electrostatic force. This motion increased out-of-plane scattering of the guided light through the evanescent interaction with the dielectric plate, and modulated the transmittance of the PC waveguide. With only a 5 μm interaction length, an extinction ratio of ∼10 dB was obtained at a wavelength of 1568 nm under an applied voltage of 60 V. The response time of the switching operation was approximately 1 ms.

    元の言語English
    記事番号011104
    ジャーナルApplied Physics Letters
    88
    発行部数1
    DOI
    出版物ステータスPublished - 2006 4 10

    ASJC Scopus subject areas

    • Physics and Astronomy (miscellaneous)

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    Iwamoto, S., Ishida, S., Arakawa, Y., Tokushima, M., Gomyo, A., Yamada, H., Higo, A., Toshiyoshi, H., & Fujita, H. (2006). Observation of micromechanically controlled tuning of photonic crystal line-defect waveguide. Applied Physics Letters, 88(1), [011104]. https://doi.org/10.1063/1.2159570