One-dimensionally periodic structure of plasma density is produced by a 400 kHz capacitively coupled discharge in 15 Pa argon. The maximum density can be increased up to above 1010-1011 cm-3 by increasing the rf power. The density ratio between the higher and lower density layers is maintained at about 0.7 in the present configuration. The transmittance of the microwave in the GHz range is measured and simply calculated. The results indicate the presence of the bandgap near about 3 GHz, which originates in the periodic structure.
|ジャーナル||Journal of Physics: Conference Series|
|出版ステータス||Published - 2013|
|イベント||11th Asia Pacific Conference on Plasma Science and Technology, APCPST 2012 and 25th Symposium on Plasma Science for Materials, SPSM 2012 - Kyoto, Japan|
継続期間: 2012 10月 2 → 2012 10月 5
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