NSPUDT using c-axis tilted ScAlN thin film

Abhay Kochhar, Yasuo Yamamoto, Akihiko Teshigahara, Ken Ya Hashimoto, Shuji Tanaka, Masayoshi Esashi

研究成果: Conference contribution

2 被引用数 (Scopus)

抄録

This paper reports finding of directionality in the 44% Scandium doped Aluminum Nitride thin film based surface acoustic wave devices. Some previously reported SAW devices using bulk substrates showed higher power of acoustic signals in either forward or backward direction depending on their crystal orientations and are called natural single-phase unidirectional transducers (NSPUDT). As these reports were based on bulk substrates, for the first time, we report NSPUDT using c-axis tilted Scandium doped Aluminum Nitride thin film SAW devices on sapphire. In addition, we also examined the c-axis tilt dependency to improve transducers return loss. It is worth to put in notice here that our observance of directionality is specifically in sezawa wave. Hence, the comparison for both acoustic waves i.e. Rayleigh and Sezawa is also reported.

本文言語English
ホスト出版物のタイトル2015 Joint Conference of the IEEE International Frequency Control Symposium and the European Frequency and Time Forum, FCS 2015 - Proceedings
出版社Institute of Electrical and Electronics Engineers Inc.
ページ633-636
ページ数4
ISBN(電子版)9781479988662
DOI
出版ステータスPublished - 2015 6 29
イベント2015 Joint Conference of the IEEE International Frequency Control Symposium and the European Frequency and Time Forum, FCS 2015 - Denver, United States
継続期間: 2015 4 122015 4 16

出版物シリーズ

名前2015 Joint Conference of the IEEE International Frequency Control Symposium and the European Frequency and Time Forum, FCS 2015 - Proceedings

Other

Other2015 Joint Conference of the IEEE International Frequency Control Symposium and the European Frequency and Time Forum, FCS 2015
国/地域United States
CityDenver
Period15/4/1215/4/16

ASJC Scopus subject areas

  • コンピュータ ネットワークおよび通信
  • 信号処理

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