Novel quantum effect devices realized by fusion of bio-template and defect-free neutral beam etching

研究成果: Conference contribution

抄録

An original top-down process involving a bio-template and damage-free neutral beam etching (NBE) has been developed to fabricate a high-quality nanodisk superlattice. The self-assemble ferritin 2D array (iron core diameter: 4.5 nm) acts as uniform etching mask and our developed neutral beam etching eliminates UV photons and high-energy charged particles to achieve a damage-free etching. As a result, we have fabricated a high-quality nanodisk superlattice with a high density (1.4 × 1012 cm-2), uniform size (Si nanodisk diameter: 6.4 nm), and well-ordered arrangement (hexagonal close packing). The Si nanodisk 2D array with SiC interlayer had an extremely high optical absorption coefficient and high carrier transport due to the formation of a wide miniband. This advanced nano-process brings high-efficiency quantum dot (QD) solar cell (SC).

本文言語English
ホスト出版物のタイトルProceedings of the 2013 IEEE 5th International Nanoelectronics Conference, INEC 2013
ページ316-317
ページ数2
DOI
出版ステータスPublished - 2013 3 13
イベント2013 IEEE 5th International Nanoelectronics Conference, INEC 2013 - Singapore, Singapore
継続期間: 2013 1 22013 1 4

出版物シリーズ

名前Proceedings - Winter Simulation Conference
ISSN(印刷版)0891-7736

Other

Other2013 IEEE 5th International Nanoelectronics Conference, INEC 2013
国/地域Singapore
CitySingapore
Period13/1/213/1/4

ASJC Scopus subject areas

  • ソフトウェア
  • モデリングとシミュレーション
  • コンピュータ サイエンスの応用

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