Novel immersion grating, VPH grating and Quasi-Bragg grating

Noboru Ebizuka, Keiko Oka, Akiko Yamada, Masako Kashiwagi, Kashiko Kodate, Koji S. Kawabata, Mariko Uehara, Chie Nagashima, Kotaro Ichiyama, Takashi Ichikawa, Tomoyuki Shimizu, Shinya Morita, Yutaka Yamagata, Hitoshi Omori, Hitoshi Tokoro, Yasuhiro Hirahara, Shuji Sato, Masanori Iye