Normal Incidence Reflectometry of Concave Multilayer Mirrors Using Synchrotron Radiation to Evaluate the Period Thickness Distribution

Tadashi Hatano, Shogo Kubota, Yasunobu Adachi, Toshihide Tsuru, Masaki Yamamoto

    研究成果: Conference contribution

    5 被引用数 (Scopus)

    抄録

    For the purpose of fabricating curved multilayer mirrors, we developed an ion beam sputtering deposition system with a programmable shutter for thickness distribution control. In this report we fabricated a Mo/Si multilayer concave mirror of a 100 mm diameter and a 300 mm radius of curvature to be used at 13.5 nm at an angle of incidence of 5°. At first a test multilayer was deposited without thickness distribution control and the lateral distribution of deposition rate was evaluated. We used the normal incidence EUV reflectometry to determine the multilayer period thickness while we usually use the small angle X-ray diffractometry when the substrate is plane. The measurements were performed at BL-12A of the Photon Factory, KEK. In an analysis of a spectral reflectance, the side band structure as well as the main peak was taken into account. The natural thickness at the outermost part was found to be 13% thinner than that at the center. Next a Mo/Si multilayer of uniform thickness over the substrate was deposited with the shutter programmed to compensate for the unevenness of deposition rate. By the normal incidence EUV reflectometry the thickness distribution was found to be successfully uniform within an error of P-V 0.3%.

    本文言語English
    ホスト出版物のタイトルSynchrotron Radiation Instrumentation
    ホスト出版物のサブタイトル8th International Conference on Synchrotron Radiation Instrumentation
    出版社American Institute of Physics Inc.
    ページ839-842
    ページ数4
    ISBN(電子版)0735401799
    DOI
    出版ステータスPublished - 2004 5月 12
    イベント8th International Conference on Synchrotron Radiation Instrumentation - San Francisco, United States
    継続期間: 2003 8月 252003 8月 29

    出版物シリーズ

    名前AIP Conference Proceedings
    705
    ISSN(印刷版)0094-243X
    ISSN(電子版)1551-7616

    Other

    Other8th International Conference on Synchrotron Radiation Instrumentation
    国/地域United States
    CitySan Francisco
    Period03/8/2503/8/29

    ASJC Scopus subject areas

    • 物理学および天文学(全般)

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