TY - GEN
T1 - Nonlinear rotational spring with tension for stabilizing electrostatically driven micromirror
AU - Sasaki, Minoru
AU - Kumagai, Shinya
AU - Hane, Kazuhiro
PY - 2008/12/1
Y1 - 2008/12/1
N2 - Thin film torsion bar with tension is introduced in the micromirror realizing the low-voltage driving. The rotational spring of this torsion bar shows the large nonlinearity which is observed in the change of the ringing frequency. The curve of the mirror rotation angle against the driving voltage becomes rather linear increasing the stable region. The origin of the nonlinearity is investigated. The combination between the tension and the vertical displacement of the torsion bar is considered for expressing the experimental result.
AB - Thin film torsion bar with tension is introduced in the micromirror realizing the low-voltage driving. The rotational spring of this torsion bar shows the large nonlinearity which is observed in the change of the ringing frequency. The curve of the mirror rotation angle against the driving voltage becomes rather linear increasing the stable region. The origin of the nonlinearity is investigated. The combination between the tension and the vertical displacement of the torsion bar is considered for expressing the experimental result.
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U2 - 10.1109/MHS.2008.4752454
DO - 10.1109/MHS.2008.4752454
M3 - Conference contribution
AN - SCOPUS:62449336406
SN - 9781424429196
T3 - 2008 International Symposium on Micro-NanoMechatronics and Human Science, MHS 2008
SP - 225
EP - 230
BT - 2008 International Symposium on Micro-NanoMechatronics and Human Science, MHS 2008, with Symposium on "COE for Education and Research of Micro-Nano Mechatronics"
T2 - 2008 International Symposium on Micro-NanoMechatronics and Human Science, MHS 2008, with Symposium on "COE for Education and Research of Micro-Nano Mechatronics", Symposium on "System Cell Engineering by Multi-scale Manipulation"
Y2 - 6 November 2008 through 9 November 2008
ER -