Nonlinear rotational spring with tension for stabilizing electrostatically driven micromirror

Minoru Sasaki, Shinya Kumagai, Kazuhiro Hane

研究成果: Conference contribution

2 被引用数 (Scopus)

抄録

Thin film torsion bar with tension is introduced in the micromirror realizing the low-voltage driving. The rotational spring of this torsion bar shows the large nonlinearity which is observed in the change of the ringing frequency. The curve of the mirror rotation angle against the driving voltage becomes rather linear increasing the stable region. The origin of the nonlinearity is investigated. The combination between the tension and the vertical displacement of the torsion bar is considered for expressing the experimental result.

本文言語English
ホスト出版物のタイトル2008 International Symposium on Micro-NanoMechatronics and Human Science, MHS 2008, with Symposium on "COE for Education and Research of Micro-Nano Mechatronics"
ページ225-230
ページ数6
DOI
出版ステータスPublished - 2008 12 1
イベント2008 International Symposium on Micro-NanoMechatronics and Human Science, MHS 2008, with Symposium on "COE for Education and Research of Micro-Nano Mechatronics", Symposium on "System Cell Engineering by Multi-scale Manipulation" - Nagoya, Japan
継続期間: 2008 11 62008 11 9

出版物シリーズ

名前2008 International Symposium on Micro-NanoMechatronics and Human Science, MHS 2008

Other

Other2008 International Symposium on Micro-NanoMechatronics and Human Science, MHS 2008, with Symposium on "COE for Education and Research of Micro-Nano Mechatronics", Symposium on "System Cell Engineering by Multi-scale Manipulation"
CountryJapan
CityNagoya
Period08/11/608/11/9

ASJC Scopus subject areas

  • Computer Vision and Pattern Recognition
  • Human-Computer Interaction
  • Electrical and Electronic Engineering

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