Nonlinear optical waveguide fabrication by direct electron-beam irradiation and thermal development using a high T_g polymer

A nonlinear optical waveguide fabrication process for use with dye doped polymer is described. The ridge-type channel waveguide containing the chromophores was fabricated by direct electron-beam irradiation. The electron beam with an energy of 25 kV and dose of 1000 μC/cm² was exposed directly onto the dye doped polymer film, and then thermal development and corona-poling were performed simultaneously. We could also demonstrate the periodically poled nonlinear optical polymer waveguide on the basis of this new process.