This paper reports the experimental result of noncontact surface profile measurement of an insulating sample made of glass with the developed electrostatic force microscope (EFM). Noncontact scanning was carried out maintaining the tip-to-sample distance of larger than 100 nm, which significantly reduces the risk of collision between the sample and the tip. The algorism named "dual-height method" calculated the profile image with cancelling the fluctuation of the tip-to-sample distance. The same sample was measured also with the AFM, and the EFM profile images agreed with the AFM profile image quantitatively.
|出版ステータス||Published - 2015 10 18|
|イベント||8th International Conference on Leading Edge Manufacturing in 21st Century, LEM 2015 - Kyoto, Japan|
継続期間: 2015 10 18 → 2015 10 22
|Other||8th International Conference on Leading Edge Manufacturing in 21st Century, LEM 2015|
|Period||15/10/18 → 15/10/22|
ASJC Scopus subject areas
- Industrial and Manufacturing Engineering