Noncontact electrostatic force microscopy for surface profile measurement of insulating materials

Shigeaki Goto, Minglei Li, Zhigang Jia, So Ito, Yuki Shimizu, Wei Gao

研究成果: Paper査読

抄録

This paper reports the experimental result of noncontact surface profile measurement of an insulating sample made of glass with the developed electrostatic force microscope (EFM). Noncontact scanning was carried out maintaining the tip-to-sample distance of larger than 100 nm, which significantly reduces the risk of collision between the sample and the tip. The algorism named "dual-height method" calculated the profile image with cancelling the fluctuation of the tip-to-sample distance. The same sample was measured also with the AFM, and the EFM profile images agreed with the AFM profile image quantitatively.

本文言語English
出版ステータスPublished - 2015 10 18
イベント8th International Conference on Leading Edge Manufacturing in 21st Century, LEM 2015 - Kyoto, Japan
継続期間: 2015 10 182015 10 22

Other

Other8th International Conference on Leading Edge Manufacturing in 21st Century, LEM 2015
CountryJapan
CityKyoto
Period15/10/1815/10/22

ASJC Scopus subject areas

  • Industrial and Manufacturing Engineering

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