Non-contact scanning nonlinear dielectric microscopy

Koya Ohara, Yasuo Cho

研究成果: Article査読

35 被引用数 (Scopus)

抄録

Contact-type scanning nonlinear dielectric microscopy (SNDM) can measure the distribution of linear and nonlinear dielectric properties of insulators with sub-nanometre resolution. SNDM, however, has a tip-abrasion problem, and this problem is one of the obstacles in obtaining a high-quality image. In this paper, in order to improve SNDM, we propose a non-contact scanning nonlinear dielectric microscopy (NC-SNDM) which focuses on the nonlinear dielectric signal for controlling the non-contact condition. With the NC-SNDM technique, topographic and SNDM images were obtained successfully. Moreover, from the calculation results, it was confirmed that NC-SNDM has atomic-order sensitivity to the gap between the tip and the specimen.

本文言語English
ジャーナルNanotechnology
16
3
DOI
出版ステータスPublished - 2005 3 1

ASJC Scopus subject areas

  • 工学(その他)
  • 材料科学(全般)
  • 物理学および天文学(その他)

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