NO and NO2 gas sensors based on surface photovoltage system fabricated by self-ordered mesoporous silicate film

Hao Shen Zhou, Takeo Yamada, Keisuke Asai, Itaru Honma, Hidekazu Uchida, Teruaki Katsube

研究成果: Chapter

3 被引用数 (Scopus)

抄録

The first NO and NO2 gas sensors based on surface photo-voltage (SPV) semiconductor device system are fabricated by the metal/ SiO2 (self-ordered hexagonal mesoporous)- /Si3N4/SiO2/Si structure. Size controlled silicate hexagonal mesoporous film is successfully synthesized by spin coating on a Si3N4SiO2/Si silicon wafer using poly (ethylene oxide)-poly (propylene oxide)-poly (ethylene oxide) (Pluronic P123=EO20PO70EO20) triblock copolymers as a template. The characteristics of mesoporous film are investigated in XRD, TEM. The sensing properties of the self-ordered hexagonal mesoporous SPV system have been investigated by exposing to the NO or NO2 gas and air repeatedly. The changes of the average value and phase of the AC photocurrent (Iph) have been observed between the NO or NO2 gas and air. The response of the alternatively photocurrent is resulted from the physical adsorption and chemical interaction between detected NO or NO2 gas and the self-ordered hexagonal mesoporous film.

本文言語English
ホスト出版物のタイトルStudies in Surface Science and Catalysis
ページ623-630
ページ数8
141
DOI
出版ステータスPublished - 2002
外部発表はい

ASJC Scopus subject areas

  • 触媒
  • 凝縮系物理学
  • 物理化学および理論化学
  • 表面、皮膜および薄膜
  • 材料化学

フィンガープリント

「NO and NO<sub>2</sub> gas sensors based on surface photovoltage system fabricated by self-ordered mesoporous silicate film」の研究トピックを掘り下げます。これらがまとまってユニークなフィンガープリントを構成します。

引用スタイル