New structural design of micro-thermoelectric sensor for wide range hydrogen detection

Maiko Nishibori, Woosuck Shin, Lionel F. Houlet, Kazuki Tajima, Toshio Itoh, Noriya Izu, Norimitsu Murayama, Ichiro Matsubara

研究成果: Article査読

40 被引用数 (Scopus)

抄録

Thermoelectric hydrogen sensor (THS) is a promising candidate for a hydrogen leak alarm system because of its unique, reliable working principle and its performance has been improved by fabricating it as a micro-device. In this study, we have investigated the performance of a micro-THS with new design of 4 × 4 mm2 chip. The integration of a thermoelectric thin film of B-dope SiGe and a ceramic catalyst of Pt 40 mass% loaded alumina into a micro hot-plate on a thin membrane, has improved its performance. We have demonstrated that the micro-THS detected the wide range of H2 concentration in air from low as 0.5 ppm to high as 5 vol%.

本文言語English
ページ(範囲)853-856
ページ数4
ジャーナルJournal of the Ceramic Society of Japan
114
1334
DOI
出版ステータスPublished - 2006
外部発表はい

ASJC Scopus subject areas

  • セラミックおよび複合材料
  • 化学 (全般)
  • 凝縮系物理学
  • 材料化学

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