New nondestructive evaluation method for surface acoustic wave velocity

Chunyun Jian, Atsushi Tsuboi, Satoshi Uda

研究成果: Article査読

抄録

A new nondestructive evaluation method for surface acoustic wave (SAW) velocity on a piezoelectric wafer was proposed. Split electrodes were formed on a glass wafer and a nonconductive liquid was interposed between the piezoelectric wafer and the glass wafer. The mode of the SAW excited on the piezoelectric wafer surface was leaky (LSAW) and its velocity was evaluated using the electrical reflection characteristics of the split electrodes. The usefulness of the new method was experimentally proven by showing the high reproducibility of the measured velocity and the agreement between the measured and calculated values indicating the SAW characteristics on a rotated-Y langasite wafer.

本文言語English
ページ(範囲)5629-5631
ページ数3
ジャーナルJapanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers
39
9 B
出版ステータスPublished - 2000 9 1
外部発表はい

ASJC Scopus subject areas

  • Engineering(all)
  • Physics and Astronomy(all)

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