New functions of scanning nonlinear dielectric microscopy - Higher-order measurement and vertical resolution

Y. Cho, K. Ohara, A. Koike, H. Odagawa

研究成果: Article査読

15 被引用数 (Scopus)

抄録

We investigated new features (functions) of scanning nonlinear dielectric microscopy (SNDM), namely, higher-order nonlinear dielectric imaging and the very high vertical resolution. The resolution of the higher-order nonlinear dielectric imaging is higher than that of the conventional nonlinear dielectric imaging which detects the lowest order of the nonlinear dielectric constant. The very high vertical resolution of SNDM is also reported. These features of the SNDM enable us to obtain a new microscopy for measuring the topography or a new displacement sensor with extremely high sensitivity.

本文言語English
ページ(範囲)3544-3548
ページ数5
ジャーナルJapanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers
40
5 B
DOI
出版ステータスPublished - 2001 5

ASJC Scopus subject areas

  • 工学(全般)
  • 物理学および天文学(全般)

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