Nanoparticulated dense and stress-free ceramic thick film for material integration

Yoshihiko Imanaka, Hideyuki Amada, Fumiaki Kumasaka, Norihiko Takahashi, Takahiro Yamasaki, Mari Ohfuchi, Chioko Kaneta

研究成果: Article査読

11 被引用数 (Scopus)

抄録

A dense, thick, and organic-binder-free ceramic film consisting of stress-free nanoparticles could be obtained at room temperature by making use of the unstable and high-surface energy amorphous phase on the surface of particles. Photolithography and wet etching can be adapted to the thick ceramic green-state film. A multilayered structure consisting of various ceramics with different sintering temperatures and Cu wiring can form on a Cu foil below 1000 °C.

本文言語English
ページ(範囲)1129-1135
ページ数7
ジャーナルAdvanced Engineering Materials
15
11
DOI
出版ステータスPublished - 2013 11 1
外部発表はい

ASJC Scopus subject areas

  • Materials Science(all)
  • Condensed Matter Physics

フィンガープリント 「Nanoparticulated dense and stress-free ceramic thick film for material integration」の研究トピックを掘り下げます。これらがまとまってユニークなフィンガープリントを構成します。

引用スタイル