Nanometric edge profile measurement of cutting tools on a diamond turning machine

Takemi Asai, Yoshikazu Arai, Yuguo Cui, I Ko

研究成果: Conference article査読

1 被引用数 (Scopus)

抄録

Single crystal diamond tools are used for fabrication of precision parts[1-5]. Although there are many types of tools that are supplied, the tools with round nose are popular for machining very smooth surfaces. Tools with small nose radii, small wedge angles and included angles are also being utilized for fabrication of micro structured surfaces such as microlens arrays[6], diffractive optical elements and so on. In ultra precision machining, tools are very important as a part of the machining equipment. The roughness or profile of machined surface may become out of desired tolerance. It is thus necessary to know the state of the tool edge accurately. To meet these requirements, an atomic force microscope (AFM) for measuring the 3D edge profiles of tools having nanometer-scale cutting edge radii with high resolution has been developed [7-8]. Although the AFM probe unit is combined with an optical sensor for aligning the measurement probe with the tools edge top to be measured in short time in this system, this time only the AFM probe unit was used. During the measurement time, that was attached onto the ultra precision turning machine to confirm the possibility of profile measurement system.

本文言語English
論文番号713314
ジャーナルProceedings of SPIE - The International Society for Optical Engineering
7133
DOI
出版ステータスPublished - 2009 3 23
イベント5th International Symposium on Instrumentation Science and Technology - Shenyang, China
継続期間: 2009 9 152009 9 18

ASJC Scopus subject areas

  • 応用数学
  • コンピュータ サイエンスの応用
  • 電子工学および電気工学
  • 電子材料、光学材料、および磁性材料
  • 凝縮系物理学

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