Single crystal diamond tools are used for fabrication of precision parts[1-5]. Although there are many types of tools that are supplied, the tools with round nose are popular for machining very smooth surfaces. Tools with small nose radii, small wedge angles and included angles are also being utilized for fabrication of micro structured surfaces such as microlens arrays, diffractive optical elements and so on. In ultra precision machining, tools are very important as a part of the machining equipment. The roughness or profile of machined surface may become out of desired tolerance. It is thus necessary to know the state of the tool edge accurately. To meet these requirements, an atomic force microscope (AFM) for measuring the 3D edge profiles of tools having nanometer-scale cutting edge radii with high resolution has been developed [7-8]. Although the AFM probe unit is combined with an optical sensor for aligning the measurement probe with the tools edge top to be measured in short time in this system, this time only the AFM probe unit was used. During the measurement time, that was attached onto the ultra precision turning machine to confirm the possibility of profile measurement system.
|ジャーナル||Proceedings of SPIE - The International Society for Optical Engineering|
|出版ステータス||Published - 2009 3 23|
|イベント||5th International Symposium on Instrumentation Science and Technology - Shenyang, China|
継続期間: 2009 9 15 → 2009 9 18
ASJC Scopus subject areas
- コンピュータ サイエンスの応用