The nanomechanical properties of single-crystalline silicon cantilevers and carbon nanotubes, as a resonating element are investigated. As the dimensions of a resonating mechanical structure decrease, the energy loss due to the surface effect increases, which results in the decrease of Q-factors. However, a thermal treatment for single-crystalline silicon in ultra-high vacuum dramatically changes their properties. In this paper the Q-factors, gas adsorption effect and nonlinearity of mechanical spring are investigated on ultrathin single crystalline silicon resonators. Also the thermal treatment effect on a carbon nanotube resonator is examined.
|出版ステータス||Published - 2003 7 23|
|イベント||IEEE Sixteenth Annual International Conference on Micro Electro Mechanical Systems - Kyoto, Japan|
継続期間: 2003 1 19 → 2003 1 23
|Other||IEEE Sixteenth Annual International Conference on Micro Electro Mechanical Systems|
|Period||03/1/19 → 03/1/23|
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