Nanomechanics of ultrathin silicon beams and carbon nanotubes

Takahito Ono, Dongfang Wang, Shinya Sugimoto, Hidetoshi Miyashita, Masayoshi Esashi

研究成果: Paper査読

2 被引用数 (Scopus)

抄録

The nanomechanical properties of single-crystalline silicon cantilevers and carbon nanotubes, as a resonating element are investigated. As the dimensions of a resonating mechanical structure decrease, the energy loss due to the surface effect increases, which results in the decrease of Q-factors. However, a thermal treatment for single-crystalline silicon in ultra-high vacuum dramatically changes their properties. In this paper the Q-factors, gas adsorption effect and nonlinearity of mechanical spring are investigated on ultrathin single crystalline silicon resonators. Also the thermal treatment effect on a carbon nanotube resonator is examined.

本文言語English
ページ33-36
ページ数4
出版ステータスPublished - 2003 7 23
イベントIEEE Sixteenth Annual International Conference on Micro Electro Mechanical Systems - Kyoto, Japan
継続期間: 2003 1 192003 1 23

Other

OtherIEEE Sixteenth Annual International Conference on Micro Electro Mechanical Systems
国/地域Japan
CityKyoto
Period03/1/1903/1/23

ASJC Scopus subject areas

  • 制御およびシステム工学
  • 機械工学
  • 電子工学および電気工学

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