Nanoindentation and diamond turning tests on compound semiconductor InP

Jiwang Yan, Hongwei Zhao, Tsunemoto Kuriyagawa, Jun'ichi Tamaki

研究成果: Conference contribution

5 被引用数 (Scopus)

抄録

Nanoindentation tests were made on single-crystal InP at various loads using a pyramid-type diamond indenter, and the resulting indents were examined using SEM and TEM. The results suggest that dislocations along the <110> directions dominate the deformation mechanism, where no phase transformation occurs. Indentation caused high-density dislocation regions below which are slip bands. The indentation mechanism was simulated by finite element method (FEM), and the simulation results were compared with the experimental results. Diamond turning experiments were also conducted to examine the ductile machining characteristics. The surface texture was found to change significantly with workpiece crystal orientations. The critical undeformed chip thickness for completely ductile-cut surfaces was measured and smooth surfaces were obtained with generating continuous ductile chips.

本文言語English
ホスト出版物のタイトルProceedings of the 6th International Conference European Society for Precision Engineering and Nanotechnology, EUSPEN 2006
編集者H. Zervos
出版社euspen
ページ276-279
ページ数4
ISBN(電子版)0955308208, 9780955308208
出版ステータスPublished - 2006 1 1
イベント6th International Conference European Society for Precision Engineering and Nanotechnology, EUSPEN 2006 - Baden bei Wien, Vienna, Austria
継続期間: 2006 5 282006 6 1

出版物シリーズ

名前Proceedings of the 6th International Conference European Society for Precision Engineering and Nanotechnology, EUSPEN 2006
2

Other

Other6th International Conference European Society for Precision Engineering and Nanotechnology, EUSPEN 2006
国/地域Austria
CityBaden bei Wien, Vienna
Period06/5/2806/6/1

ASJC Scopus subject areas

  • 産業および生産工学
  • 材料科学(全般)
  • 機械工学
  • 器械工学
  • 環境工学

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