Nanocrystalline diamond formation by using an inductively coupled radio-frequency CH4/H2/Ar plasma

Reijiro Ikada; Satoru Iizuka

doi:10.1016/j.diamond.2004.12.035

Nanocrystalline diamond formation by using an inductively coupled radio-frequency CH₄/H₂/Ar plasma

Reijiro Ikada, Satoru Iizuka

研究成果: Article › 査読

7 被引用数 (Scopus)

抄録

Effect of gas-mixing ratio on the formation of nanocrystalline diamond has been investigated in a low electron temperature CH₄/H₂/Ar plasma produced by inductively coupled rf discharge. The gas-mixing ratio is controlled by introducing an orifice between the plasma production region and the deposition region. When the diameter of the orifice is 6 mm, the Raman spectrum indicating a deposition of nanocrystalline diamond is observed when the gas-mixing ratio is less than ∼0.03. The reduction of CH₄ gas-mixing ratio is important for the formation of nanocrystalline diamonds.

本文言語	English
ページ（範囲）	446-450
ページ数	5
ジャーナル	Diamond and Related Materials
巻	14
号	3-7
DOI	https://doi.org/10.1016/j.diamond.2004.12.035
出版ステータス	Published - 2005 3月
外部発表	はい

ASJC Scopus subject areas

電子材料、光学材料、および磁性材料
化学 (全般)
機械工学
材料化学
電子工学および電気工学

文献へのアクセス

10.1016/j.diamond.2004.12.035

他のファイルとリンク

引用スタイル

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title = "Nanocrystalline diamond formation by using an inductively coupled radio-frequency CH4/H2/Ar plasma",

abstract = "Effect of gas-mixing ratio on the formation of nanocrystalline diamond has been investigated in a low electron temperature CH4/H2/Ar plasma produced by inductively coupled rf discharge. The gas-mixing ratio is controlled by introducing an orifice between the plasma production region and the deposition region. When the diameter of the orifice is 6 mm, the Raman spectrum indicating a deposition of nanocrystalline diamond is observed when the gas-mixing ratio is less than ∼0.03. The reduction of CH4 gas-mixing ratio is important for the formation of nanocrystalline diamonds.",

keywords = "Diamond crystal, Nanocrystalline diamond, Plasma CVD, Synthetic diamond",

author = "Reijiro Ikada and Satoru Iizuka",

note = "Funding Information: The authors are indebted to Dr. T. Abe for the film analysis. The work was partially supported by a Grant-in-Aid for Scientific Research from the Ministry of Education, Culture, Sports, Science and Technology, Japan.",

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KW - Synthetic diamond

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