Nanocrystalline diamond-based field-effect capacitive pH sensor

P. Christiaens, M. H. Abouzar, A. Poghossian, T. Wagner, N. Bijnens, O. A. Williams, M. Daenen, K. Haenen, M. J. Schöning, P. Wagner

研究成果: Conference contribution

抄録

The pH-sensitive properties of field-effect capacitive electrolyte-diamond- insulator-semiconductor (EDIS) sensors with undoped nanocrystalline diamond (NCD) thin films (100-500 nm) having hydrogen (H)- and oxygen (O)-terminated surfaces have been investigated. The NCD films were grown on p-Si-SiO 2 substrates by a microwave plasma-enhanced chemical vapour deposition from a mixture of methane and hydrogen. The EDIS sensors have been characterised by means of capacitance-voltage spectroscopy, constant-capacitance and impedance-spectroscopy method. The developed EDIS sensors with O-terminated and H-terminated NCD surfaces show an average pH sensitivity of 38 mV/pH and 34-36 mV/pH, respectively. A possible mechanism of the pH sensitivity is discussed.

本文言語English
ホスト出版物のタイトルTRANSDUCERS and EUROSENSORS '07 - 4th International Conference on Solid-State Sensors, Actuators and Microsystems
ページ1891-1894
ページ数4
DOI
出版ステータスPublished - 2007 12月 1
イベント4th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS and EUROSENSORS '07 - Lyon, France
継続期間: 2007 6月 102007 6月 14

出版物シリーズ

名前TRANSDUCERS and EUROSENSORS '07 - 4th International Conference on Solid-State Sensors, Actuators and Microsystems

Other

Other4th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS and EUROSENSORS '07
国/地域France
CityLyon
Period07/6/1007/6/14

ASJC Scopus subject areas

  • 制御およびシステム工学
  • 電子工学および電気工学

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