Multi-functional surface acoustic wave sensor for monitoring environmental and structural condition

Y. Furuya, T. Kon, T. Okazaki, Y. Saigusa, T. Nomura

研究成果: Conference contribution

抄録

As a first step to develop a health monitoring system with active and embedded nondestructive evaluation devices for the machineries and structures, multi-functional SAW (surface acoustic wave) device was developed. A piezoelectric LiNbO3(x-y cut) materials were used as a SAW substrate on which IDT(20μm pitch) was produced by lithography. On the surface of a path of SAW between IDTs, environmentally active material films of shape memory Ti50Ni41Cu(at%) with non-linear hysteresis and superelastic Ti48Ni43Cu(at%) with linear deformation behavior were formed by magnetron-sputtering technique. In this study, these two kinds of shape memory alloys(SMA) system were used to measure 1) loading level, 2) phase transformation and 3)stress-strain hysteresis under cyclic loading by utilizing their linearity and non-linearity deformation behaviors. Temperature and stress dependencies of SAW signal were also investigated in the non-sputtered film state. Signal amplitude and phase change of SAW were chosen to measure as the sensing parameters. As a result, temperature, stress level, phase transformation in SMA depending on temperature and mechanical damage accumulation could be measured by the proposed multi-functional SAW sensor. Moreover, the wireless SAW sensing system which has a unique feature of no supplying electric battery was constructed, and the same characteristic evaluation is confirmed in comparison with wired case..

本文言語English
ホスト出版物のタイトルSmart Structures and Materials 2006 - Smart Electronics, MEMS, BioMEMS, and Nanotechnology
DOI
出版ステータスPublished - 2006
外部発表はい
イベントSmart Structures and Materials 2006 - Smart Electronics, MEMS, BioMEMS, and Nanotechnology - San Diego, CA, United States
継続期間: 2006 2月 272006 3月 1

出版物シリーズ

名前Proceedings of SPIE - The International Society for Optical Engineering
6172
ISSN(印刷版)0277-786X

Other

OtherSmart Structures and Materials 2006 - Smart Electronics, MEMS, BioMEMS, and Nanotechnology
国/地域United States
CitySan Diego, CA
Period06/2/2706/3/1

ASJC Scopus subject areas

  • 電子材料、光学材料、および磁性材料
  • 凝縮系物理学
  • コンピュータ サイエンスの応用
  • 応用数学
  • 電子工学および電気工学

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