Multi-component co-condensation model of Ti-based boride/silicide nanoparticle growth in induction thermal plasmas

Masaya Shigeta, Takayuki Watanabe

研究成果: Article査読

25 被引用数 (Scopus)

抄録

Numerical analysis is conducted for the titanium-based boride and silicide nanoparticle synthesis using an induction thermal plasma including the material evaporation process and the nanoparticle growth process with nucleation and co-condensation. Both systems present the nano-scaled particle size distributions. Ti-B system shows the smaller particle diameter, sharper distribution, larger particle number density, and wider range of the composition than Ti-Si system. Ti-Si system provides a narrower range of the silicon content due to the simultaneous co-condensation of titanium and silicon. Finally the correlation between the particle size and the nonmetal content of the synthesized nanoparticles is presented on a chart.

本文言語English
ページ(範囲)4217-4227
ページ数11
ジャーナルThin Solid Films
515
9
DOI
出版ステータスPublished - 2007 3月 12
外部発表はい

ASJC Scopus subject areas

  • 電子材料、光学材料、および磁性材料
  • 表面および界面
  • 表面、皮膜および薄膜
  • 金属および合金
  • 材料化学

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