We have measured the macroscopic andmicroscopic surface morphology of hydrogen-terminated Si(110)-(1 × 1) [H:Si(110)-(1 × 1)] surfaces prepared by an improved wet chemical process. The observations were performed by high-resolution electron-energy-loss spectroscopy (HREELS), low-energy-electron diffraction LEED), and scanning tunneling microscopy (STM). At macroscopic scale, it was found that the surface is a mono-hydride terminated surface with a two-dimensional p2mg space group, thus, being a well-defined H:Si(110)-(1 × 1) surface. At microscopic scale, elongated terraces were observed along the [11¯0] direction reflecting surface anisotropy. The terraces extend in frames with sizes up to a few micrometers. We discussed the macroscopic and microscopic surface morphology by combining our LEED and STM results.
ASJC Scopus subject areas