Monolithic integration of pseudo-spin-MOSFETs using a custom CMOS chip fabricated through multi-project wafer service

R. Nakane, Y. Shuto, H. Sukegawa, Z. C. Wen, S. Yamamoto, S. Mitani, M. Tanaka, K. Inomata, S. Sugahara

    研究成果: Conference contribution

    2 被引用数 (Scopus)

    抄録

    We demonstrated monolithic integration of pseudo-spin-MOSFETs (PS-MOSFETs) using vendor-made MOSFETs fabricated in a low-cost multi-project wafer (MPW) product and lab-made magnetic tunnel junctions (MTJs) formed on the topmost passivation film of the MPW chip. The tunneling magnetoresistance (TMR) ratio of the fabricated MTJs strongly depended on the surface roughness of the passivation film. Nevertheless, after the chip surface was atomically flattened by SiO2 deposition and successive chemical-mechanical polish (CMP) process, the fabricated MTJs on the surface exhibited a sufficiently large TMR ratio (≥ 140 %) adaptable to the PS-MOSFET application. The implemented PS-MOSFETs showed clear modulation of the output current controlled by the magnetization configuration of the MTJs, and a maximum magnetocurrent ratio of 90 % was achieved. These magnetocurrent behaviors were quantitatively consistent with those predicted by HSPICE simulations. The developed integration technique using a MPW CMOS chip would also be applied to monolithic integration of CMOS devices/circuits and other various functional devices/materials, which would open the door for exploring CMOS-based new functional hybrid circuits.

    本文言語English
    ホスト出版物のタイトルESSDERC 2013 - Proceedings of the 43rd European Solid-State Device Research Conference
    出版社IEEE Computer Society
    ページ272-275
    ページ数4
    ISBN(印刷版)9781479906499
    DOI
    出版ステータスPublished - 2013
    イベント43rd European Solid-State Device Research Conference, ESSDERC 2013 - Bucharest, Romania
    継続期間: 2013 9月 162013 9月 20

    出版物シリーズ

    名前European Solid-State Device Research Conference
    ISSN(印刷版)1930-8876

    Conference

    Conference43rd European Solid-State Device Research Conference, ESSDERC 2013
    国/地域Romania
    CityBucharest
    Period13/9/1613/9/20

    ASJC Scopus subject areas

    • 電子工学および電気工学
    • 安全性、リスク、信頼性、品質管理

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