Molecular dynamics simulation of form measurement process of soft materials using atomic force microscope

Yindi Cai, Yuan Liu Chen, Yuki Shimizu, So Ito, Wei Gao

研究成果: Conference contribution

抄録

Molecular dynamics simulations of contact mode form measurement process on a soft substrate with a special surface profile using a diamond AFM tip are preformed to investigate the contact behavior and the surface profile damages or distortions of the measured substrate. The process of contact mode imaging of the AFM can be treated as the process of nano-scratching. The simulation-predicted interaction force, including scratching force and normal force, characterizes the saw-tooth pattern, which is referred to as atomic stick-slips. The shape of measured substrate surface, especially the surface underneath the AFM tip, is distorted by the interaction force between the AFM tip and the substrate surface.

本文言語English
ホスト出版物のタイトル2016 IEEE 11th Annual International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2016
出版社Institute of Electrical and Electronics Engineers Inc.
ページ156-159
ページ数4
ISBN(電子版)9781509019472
DOI
出版ステータスPublished - 2016 11 28
イベント11th IEEE Annual International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2016 - Sendai, Japan
継続期間: 2016 4 172016 4 20

出版物シリーズ

名前2016 IEEE 11th Annual International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2016

Other

Other11th IEEE Annual International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2016
CountryJapan
CitySendai
Period16/4/1716/4/20

ASJC Scopus subject areas

  • Industrial and Manufacturing Engineering
  • Mechanical Engineering
  • Mechanics of Materials
  • Electronic, Optical and Magnetic Materials

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