Moiré displacement measurement technique for a linear encoder

K. Hane, Y. Uchida, S. Hattori

研究成果: Article査読

13 被引用数 (Scopus)

抄録

The light intensity diffracted from superimposed dual transmission gratings is sensitive to their relative lateral displacement but is also affected by changes in the air gap between them. Averaging the diffracted light intensities obtained in the gap range of a Fourier image distance, the resultant intensity was almost independent of the gap between the two gratings and had a period of half the pitch of the grating for the lateral displacement. This method can be used for a linear encoder in precision machining.

本文言語English
ページ(範囲)89-95
ページ数7
ジャーナルOptics and Laser Technology
17
2
DOI
出版ステータスPublished - 1985 4
外部発表はい

ASJC Scopus subject areas

  • 電子材料、光学材料、および磁性材料
  • 原子分子物理学および光学
  • 電子工学および電気工学

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