Modeling and experimental validation of the performance of a silicon XY-microstage driven by PZT actuators

Mohd Faizul Mohd Sabri, Takahito Ono, Masayoshi Esashi

研究成果: Article査読

24 被引用数 (Scopus)

抄録

In this paper, the design and evaluation of silicon-based PbZrTiO 3 (PZT) driven XY-microstages with total dimensions of 20 × 20 × 0.4 mm3 are presented. The PZT actuator has the advantage of having high accuracy and high intrinsic resonance frequency. However, its displacement is very small; thus Moonie amplification mechanisms are integrated to magnify the displacement. Finite element method simulation is carried out to obtain the microstage performance and identify its design parameters. It is demonstrated that an amplification factor of up to 18 times is possible using the silicon Moonie amplification mechanism, resulting in displacements of 82 νm and 60 νm at an applied voltage of 70 V for the X and Y directions, respectively. Furthermore, this microstage produces resonance frequencies of 261 Hz and 642 Hz in the X and Y directions, respectively.

本文言語English
論文番号095004
ジャーナルJournal of Micromechanics and Microengineering
19
9
DOI
出版ステータスPublished - 2009 11 9

ASJC Scopus subject areas

  • 電子材料、光学材料、および磁性材料
  • 材料力学
  • 機械工学
  • 電子工学および電気工学

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