Modeling and analysis of self-heating in FinFET devices for improved circuit and EOS/ESD performance

Seshadri Kolluri, Kazuhiko Endo, Eiichi Suzuki, Kaustav Banerjee

研究成果: Conference article査読

39 被引用数 (Scopus)


A rigorous analytical thermal model has been formulated for the analysis of self-heating effects in FinFETs, under both steady-state and transient stress conditions. 3-D self-consistent electrothermal simulations, calibrated with experimentally measured electrical characteristics, were used to understand the nature of self-heating in FinFETs and calibrate the proposed model. The accuracy of the model has been demonstrated for a wide range of multi-fin devices, by comparing against finite element simulations. The model has been applied to carry out a detailed sensitivity analysis of self-heating with respect to various FinFET parameters and structures which are critical for improving circuit performance and EOS/ESD reliability. The transient model has been used to estimate the thermal time constants of these devices and predict the sensitivity of power-to-failure to various device parameters, for both long and short pulse ESD situations.

ジャーナルTechnical Digest - International Electron Devices Meeting, IEDM
出版ステータスPublished - 2007 12 1
イベント2007 IEEE International Electron Devices Meeting, IEDM - Washington, DC, United States
継続期間: 2007 12 102007 12 12

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Electrical and Electronic Engineering
  • Materials Chemistry

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