Modeling and analysis of a scanning electrostatic force microscope for surface profile measurement

Zhigang Jia, Shigeaki Goto, Keiichiro Hosobuchi, So Ito, Yuki Shimizu, Wei Gao

研究成果: Conference contribution

抄録

This paper presents the analysis of a prototype scanning electrostatic force microscope (SEFM) system developed for noncontact surface profile measurement. In the SEFM system, with a dual height method, the distance between the probe tip and the sample surface can be accurately obtained through removing the influence of the electric field distribution on the sample surface. Since the electrostatic force is greatly influenced by the capacitance between the probe tip and the sample surface, a new approach for modeling and analysis of the distribution of capacitance between the probe tip with an arbitrary shape and the sample surface with a random topography by using the finite difference method (FDM) is proposed. The electrostatic forces calculated by the FDM method and the conventional sphere-plane model are compared to verify the validity of the FDM method. The frequency shift values measured by experiment are also compared with the simulation results computed by the FDM method. It has been demonstrated that the electrostatic force between arbitrary shapes of the probe tip and the sample surface can be well calculated by the finite difference method.

本文言語English
ホスト出版物のタイトルEighth International Symposium on Precision Engineering Measurements and Instrumentation
DOI
出版ステータスPublished - 2013
イベント8th International Symposium on Precision Engineering Measurements and Instrumentation - Chengdu, China
継続期間: 2012 8 82012 8 11

出版物シリーズ

名前Proceedings of SPIE - The International Society for Optical Engineering
8759
ISSN(印刷版)0277-786X

Other

Other8th International Symposium on Precision Engineering Measurements and Instrumentation
国/地域China
CityChengdu
Period12/8/812/8/11

ASJC Scopus subject areas

  • 電子材料、光学材料、および磁性材料
  • 凝縮系物理学
  • コンピュータ サイエンスの応用
  • 応用数学
  • 電子工学および電気工学

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