Mode-Matched Multi-Ring Disk Resonator Using Single Crystal (100) Silicon

研究成果: Conference contribution

抄録

In this paper, we report two types of novel mode-matched disk resonators consisting of multi rings made by single crystal (100) silicon. One of the resonators compensates the frequency mismatch using a combination of thick ring and multiple thin rings, showing the mode mismatch as small as 43 ppm. The other one uses elliptic shape connection structures, showing the mode-mismatch as small as 61 ppm. Considering the robustness of mode matching against fabrication errors, the crystal orientation error increases the frequency mismatch more significantly in the first design, and the ring width variation causes larger frequency split in the later design.

本文言語English
ホスト出版物のタイトルINERTIAL 2021 - 8th IEEE International Symposium on Inertial Sensors and Systems, Proceedings
出版社Institute of Electrical and Electronics Engineers Inc.
ISBN(電子版)9781728150994
DOI
出版ステータスPublished - 2021 3 22
イベント8th IEEE International Symposium on Inertial Sensors and Systems, INERTIAL 2021 - Virtual, Kailua-Kona, United States
継続期間: 2021 3 222021 3 25

出版物シリーズ

名前INERTIAL 2021 - 8th IEEE International Symposium on Inertial Sensors and Systems, Proceedings

Conference

Conference8th IEEE International Symposium on Inertial Sensors and Systems, INERTIAL 2021
国/地域United States
CityVirtual, Kailua-Kona
Period21/3/2221/3/25

ASJC Scopus subject areas

  • 制御と最適化
  • 器械工学

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